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Internal stress relaxation based method to extract the Young's modulus of brittle and ductile thin layers

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Boé, A. [] Coulombier, Michaël [UCL] Colla, Marie-Stéphane [UCL] Bhaskar, Umesh Kumar [UCL] Zulfiqar, Azeem [UCL] Pardoen, Thomas [UCL] Raskin, Jean-Pierre [UCL]
Document type Communication à un colloque (Conference Paper) – Présentation orale sans comité de sélection
Publication date 2009
Language Anglais
Conference "Innovations in Thin Film Processing and Characterization - ITFPC'09", Nancy - France (du 17/11/2009 au 20/11/2009)
Peer reviewed yes
Host document "Proceedings of the Innovations in Thin Film Processing ans Characterization"- Paper O 3.3, p 12
Publication status Publié
Affiliations UCL - FSA/MAPR - Département des sciences des matériaux et des procédés
UCL -
UCL - FSA/ELEC - Département d'électricité
Links
Bibliographic reference Boé, A. ; Coulombier, Michaël ; Colla, Marie-Stéphane ; Bhaskar, Umesh Kumar ; Zulfiqar, Azeem ; et. al. Internal stress relaxation based method to extract the Young's modulus of brittle and ductile thin layers.Innovations in Thin Film Processing and Characterization - ITFPC'09 (Nancy - France, du 17/11/2009 au 20/11/2009). In: Proceedings of the Innovations in Thin Film Processing ans Characterization, 2009, p.Paper O 3.3, p 12
Permanent URL http://hdl.handle.net/2078.1/75663