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Internal stress relaxation based method to extract the Young's modulus of brittle and ductile thin layers

Bibliographic reference Boé, A. ; Coulombier, Michaël ; Colla, Marie-Stéphane ; Bhaskar, Umesh Kumar ; Zulfiqar, Azeem ; et. al. Internal stress relaxation based method to extract the Young's modulus of brittle and ductile thin layers.Innovations in Thin Film Processing and Characterization - ITFPC'09 (Nancy - France, du 17/11/2009 au 20/11/2009). In: Proceedings of the Innovations in Thin Film Processing ans Characterization, 2009, p.Paper O 3.3, p 12
Permanent URL http://hdl.handle.net/2078.1/75663