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The control and impact of processing ambient during rapid thermal processing

Bibliographic reference Maex, K. ; Kondoh, E. ; Lauwers, A. ; Steegen, A. ; De Potter, M. ; et. al. The control and impact of processing ambient during rapid thermal processing.the Materials Research Society Symposium (Boston - MA, 1998). In: Proceedings , 1998, p. 297
Permanent URL http://hdl.handle.net/2078/70954