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A new approach for the measurement of resistivity and cross-sectional area of an aluminum interconnect line : principle and applications

Bibliographic reference Li, H. ; Jin, S. ; Proost, Joris ; Van Hove, M. ; Froyen, L. ; et. al. A new approach for the measurement of resistivity and cross-sectional area of an aluminum interconnect line : principle and applications.the Mater. Res. Soc. Conference on Advanced Metallization and Interconnect Systems for ULSI Applications (1998). In: Proceedings , 1998, p. 197
Permanent URL http://hdl.handle.net/2078/70953