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Rapid thermal annealing of electroplated Cu films

Bibliographic reference Beyer, G.P. ; Kitabjian, P. ; Brongersma, S.H. ; Proost, Joris ; Bender, H. ; et. al. Rapid thermal annealing of electroplated Cu films.Mater. Res. Soc. Conference on Advanced Metallization and Interconnect Systems for ULSI Applications (1999). In: Proceedings, 1999, p. 167
Permanent URL http://hdl.handle.net/2078/70949