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Effect of Cu on Al interfacial mass transport in bamboo RIE and damascene Al(Cu)

Bibliographic reference Proost, Joris ; Li, H. ; Witvrouw, A. ; Maex, K.. Effect of Cu on Al interfacial mass transport in bamboo RIE and damascene Al(Cu).Materials Research Society Symposium (San Francisco - CA, 1999). In: Proceedings , 1999, p. 563, 91
Permanent URL http://hdl.handle.net/2078/70947