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In-situ study of the stiffness of alumina thin films during vapor deposition

Bibliographic reference Proost, Joris ; Spaepen, F.. In-situ study of the stiffness of alumina thin films during vapor deposition.Mater. Res. Soc. Symposium on Mechanisms of Surface and Microstructure Evolution in Deposited Films and Film Structures (San Francisco - CA, 2001). In: Proceedings, 2001, p. 672, O.9.9
Permanent URL http://hdl.handle.net/2078/70946