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In-situ study of the growth stress and stiffness of alumina thin films during vapor deposition
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Document type | Communication à un colloque (Conference Paper) – Présentation orale avec comité de sélection |
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Publication date | 2002 |
Language | Anglais |
Conference | "14th U.S. National Congress of Applied Mechanics, Symposium on Mechanics of Thin Films and Other Small Structures", Blacksburg - VA (2002) |
Peer reviewed | yes |
Host document | "Proceedings "- p. 473 |
Affiliation | UCL - |
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Bibliographic reference | Proost, Joris ; Spaepen, F.. In-situ study of the growth stress and stiffness of alumina thin films during vapor deposition.14th U.S. National Congress of Applied Mechanics, Symposium on Mechanics of Thin Films and Other Small Structures (Blacksburg - VA, 2002). In: Proceedings , 2002, p. 473 |
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Permanent URL | http://hdl.handle.net/2078/70945 |