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In-situ study of the growth stress and stiffness of alumina thin films during vapor deposition

Bibliographic reference Proost, Joris ; Spaepen, F.. In-situ study of the growth stress and stiffness of alumina thin films during vapor deposition.14th U.S. National Congress of Applied Mechanics, Symposium on Mechanics of Thin Films and Other Small Structures (Blacksburg - VA, 2002). In: Proceedings , 2002, p. 473
Permanent URL http://hdl.handle.net/2078/70945