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Combined ellipsometric porosimetry and in-situ stiffness measurements of alumina thin films

Bibliographic reference Proost, Joris ; Baklanov, M. ; Spaepen, F.. Combined ellipsometric porosimetry and in-situ stiffness measurements of alumina thin films.4th International Conference on Inorganic Materials (Antwerp, September 2004). In: Proceedings , 2004, p. 409
Permanent URL http://hdl.handle.net/2078.1/70944