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Effect of deposition parameters on the stress gradient of CVD and PECVD poly-SiGe for MEMS applications

Bibliographic reference Van der Donck, T. ; Proost, Joris ; Baert, K. ; Van Hoof, C. ; Witvrouw, A.. Effect of deposition parameters on the stress gradient of CVD and PECVD poly-SiGe for MEMS applications.the SPIE Conference on Micromachining and Microfabrication Process Technology (San Francisco - CA, 2004). In: Proceedings, 2004, p. 8-18
Permanent URL http://hdl.handle.net/2078.1/70942