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Fabrication and modeling of 3-D self-assembled SOI MEMS using plasticity features

Bibliographic reference Iker, François ; André, Nicolas ; Proost, Joris ; Pardoen, Thomas ; Raskin, Jean-Pierre. Fabrication and modeling of 3-D self-assembled SOI MEMS using plasticity features.18th IEEE International Conference on MicroElectroMechanical Systems - MEMS 2005 (Miami, Floride, USA, January 30-February 3 2005). In: Proceedings , 2005, p. 459-462
Permanent URL http://hdl.handle.net/2078.1/70910