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In-situ internal stress measurements during sputter deposition of metallic oxide thin films for photovoltaic applications

Bibliographic reference Michotte, Sébastien ; Proost, Joris. In-situ internal stress measurements during sputter deposition of metallic oxide thin films for photovoltaic applications.5th Forum of New Materials Solutions for Sustainable Energy, Symposium Photovoltaic Solar Energy Conversion : Materials and Technology Challenges (Montecatini, 2010). In: Proceedings, 2010, p. FG_2:L07,73
Permanent URL http://hdl.handle.net/2078.1/70832