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Characterization of atomic layer deposited nanoscale structure on dense dielectric substrates by X-ray reflectivity

Bibliographic reference Travaly, Y ; Schuhmacher, J. ; Hoyas, A. Martin ; Abell, T. ; Sutcliffe, V. ; et. al. Characterization of atomic layer deposited nanoscale structure on dense dielectric substrates by X-ray reflectivity. In: Microelectronic Engineering, Vol. 82, p. 639-644 (2005)
Permanent URL http://hdl.handle.net/2078.1/70800