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Extent of plasma damage to porous organosilicate films characterized with nanoindentation, x-ray reflectivity, and surface acoustic waves

Bibliographic reference Jonas, Alain M. ; Iacopi, F ; et. al. Extent of plasma damage to porous organosilicate films characterized with nanoindentation, x-ray reflectivity, and surface acoustic waves. In: J. Mater. Res., Vol. 21, p. 3161-3167 (2006)
Permanent URL http://hdl.handle.net/2078.1/70798