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Compensation effect during water desorption from siloxane-based spin-on dielectric thin films

Bibliographic reference Proost, Joris ; Baklanov, M. ; Maex, K. ; Delaey, L.. Compensation effect during water desorption from siloxane-based spin-on dielectric thin films. In: Journal of Vacuum Science and Technology, Vol. B18, p. 303-306 (2000)
Permanent URL http://hdl.handle.net/2078/70714