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Micro-texture and electromigration-induced drift in electroplated damascene Cu

Bibliographic reference Proost, Joris ; Hirato, T. ; Furuhara, T. ; Maex, K. ; Celis, J-P.. Micro-texture and electromigration-induced drift in electroplated damascene Cu. In: Journal of Applied Physics, Vol. 87, no. 6, p. 2792-2802 (2000)
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