User menu

Evolution of the growth stress, stiffness and microstructure of alumina thin films during vapor deposition

Bibliographic reference Proost, Joris ; Spaepen, F.. Evolution of the growth stress, stiffness and microstructure of alumina thin films during vapor deposition. In: Journal of Applied Physics, Vol. 91, no. 1, p. 204-216 (2002)
Permanent URL http://hdl.handle.net/2078/70698
  1. R. W. Hoffman,Physics of Thin Films, edited by G. Hass and R. E. Thun (Academic, New York, 1966), Vol. 3, p. 211.
  2. Abermann, Thin Solid Films, 58, 365 (1979)
  3. Doerner, CRC Crit. Rev. Solid State Mater. Sci., 14, 224 (1988)
  4. Spaepen, Acta Mater., 48, 31 (2000)
  5. Hoffman, Thin Solid Films, 34, 185 (1976)
  6. Nix, J. Mater. Res., 14, 3467 (1999)
  7. Seel, J. Appl. Phys., 88, 7079 (2000)
  8. Hinze, J. Appl. Phys., 88, 2443 (2000)
  9. Pannikkat, Acta Mater., 47, 3423 (1999)
  10. Huey, J. Am. Ceram. Soc., 82, 1941 (1999)
  11. Thornton, Ceram. Bull., 56, 504 (1977)
  12. Parfitt, J. Appl. Phys., 77, 3029 (1995)
  13. Huang, Acta Mater., 48, 3261 (2000)
  14. Coble, J. Am. Ceram. Soc., 39, 377 (1956)
  15. Floro J. A., Chason E., Lee S. R., Real Time Measurement of Epilayer Strain Using a Simplified Wafer Curvature Technique, 10.1557/proc-406-491
  16. Saenger, Appl. Opt., 30, 1221 (1991)
  17. Brantley, J. Appl. Phys., 44, 534 (1973)
  18. J. Nye,Physical Properties of Crystals: Their Representation by Tensors and Matrices, 2nd ed. (Oxford University Press, Oxford, UK, 1985), p. 141.
  19. G. Simmons and H. Wang,Single Crystal Elastic Constants and Calculated Aggregate Properties: A Handbook, 2nd ed. (MIT Press, Cambridge, MA, 1971), p. 146.
  20. Tefft Wayne E., Elastic constants of synthetic single crystal corundum, 10.6028/jres.070a.024
  21. White, Thermochim. Acta, 218, 83 (1993)
  22. D. D. Fong, Ph.D. thesis, Harvard University, Cambridge, MA, 2001, p. 36.
  23. Baklanov, J. Vac. Sci. Technol. B, 18, 1385 (2000)
  24. S. J. Gregg and S. W. Sing,Adsorption, Surface Area and Porosity, 2nd ed. (Academic, New York, 1982), p. 126.
  25. M. Born and E. Wolf,Principle of Optics, 6th ed. (Pergamon, New York, 1980), p. 87.
  26. Geyer, J. Appl. Phys., 83, 3065 (1998)
  27. A.-L. Barabasi and H. E. Stanley,Fractal Concepts in Surface Growth(Cambridge University Press, Cambridge, UK, 1995).
  28. Shull, J. Appl. Phys., 80, 6243 (1996)
  29. Hanada, J. Non-Cryst. Solids, 113, 213 (1989)
  30. Hearne, Appl. Phys. Lett., 74, 356 (1999)
  31. Proost Joris, Spaepen Frans, In-situ study of the stiffness of alumina thin films during vapor deposition, 10.1557/proc-671-o9.9
  32. Hashin Zvi, Rosen B. Walter, The Elastic Moduli of Fiber-Reinforced Materials, 10.1115/1.3629590
  33. Hashin Zvi, Rosen B. Walter, Erratum: “The Elastic Moduli of Fiber-Reinforced Materials” (Journal of Applied Mechanics, 1964, 31, pp. 223–232), 10.1115/1.3625735
  34. Phani, J. Mater. Sci., 31, 262 (1996)
  35. Thornton, J. Vac. Sci. Technol., 11, 666 (1974)
  36. Weaire, Acta Metall., 19, 779 (1971)
  37. Fritz, J. Appl. Phys., 45, 4124 (1974)
  38. P. Beckmann and A. Spizzichino,The Scattering of Electromagnetic Waves from Rough Surfaces(Pergamon, New York, 1963).
  39. Carniglia C. K., Scalar Scattering Theory for Multilayer Optical Coatings, 10.1117/12.7972335
  40. Zuiker, J. Appl. Phys., 79, 3541 (1996)