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Ion implanted MOS transistors

Bibliographic reference Demoulin, E. ; Van de Wiele, F.. Ion implanted MOS transistors.Proceedings of the NATO Advanced Study Institute on Process and Device Modelling for Integrated Circuit Design (Louvain-la-Neuve, Belgium, 19-29 July 1977). In: van de Wiele, F.; Engl, W.L.; Jespers, P.G.;, Proceedings of the NATO Advanced Study Institute on Process and DeviceModelling for Integrated Circuit Design, Noordhoff1977, p. 617-676
Permanent URL http://hdl.handle.net/2078.1/68498