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The damage induced on the (111) silicon surface by low energy helium ions investigated by ion scattering spectroscopy (ISS)

Bibliographic reference Bertrand, Patrick ; Bezy, J.-L. ; Gloesener, P.. The damage induced on the (111) silicon surface by low energy helium ions investigated by ion scattering spectroscopy (ISS). In: Nuclear Instruments and Methods in Physics Research, Vol. 209-210, p. 371-373 (1983)
Permanent URL http://hdl.handle.net/2078.1/68423