User menu

A new isolation process for VLSI devices

Bibliographic reference Figueras, E. ; Coppee, J.L. ; Van de Wiele, F.. A new isolation process for VLSI devices.Solid State Devices. Proceedings of the 17th European Solid State Device Research Conference, ESSDERC '87 (Bologna, Italy, 14-17 September 1987). In: Soncini, G.; Calzolari, P.U.;, Solid State Devices. Proceedings of the 17th European Solid StateDevice Research Conference, ESSDERC '87, North-holland1988, p. 435-438
Permanent URL http://hdl.handle.net/2078.1/68338