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Study of the sputter rate of thin aluminium layers deposited on polymer (PET) substrates

Bibliographic reference De Puydt, Y. ; Bertrand, Patrick. Study of the sputter rate of thin aluminium layers deposited on polymer (PET) substrates. In: Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, Vol. B39, p. 86-90 (1989)
Permanent URL http://hdl.handle.net/2078.1/68335