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Novel parametric-effect MEMS amplifiers/transducers

Bibliographic reference Raskin, Jean-Pierre ; Khuri-Yakub, B.T. ; Rebeiz, G.M.. Novel parametric-effect MEMS amplifiers/transducers.Proceedings of 7th International Conference on New Actuators - ACTUATOR 2000 (Bremen, Germany, 19-21 June 2000). In: Borgmann, H.;, ACTUATOR 2000. 7th International Conference on New Actuators andInternational Exhibition on Smart Actuators and Drive Systems.Conference Proceedings, Messe bremen gmbh2000, p. 494-497
Permanent URL http://hdl.handle.net/2078.1/68158