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Fully CMOS compatible low-power microheater

Bibliographic reference Laconte, Jean ; Dupont, C. ; Akheyar, A. ; Raskin, Jean-Pierre ; Flandre, Denis. Fully CMOS compatible low-power microheater.Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 (Cannes (France), du 05/05/2002 au 08/05/2002). In: Proceedings of SPIE - the International Society for Optical Engineering, Spie-int. soc. opt. eng2002, p.634-644
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