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SOI CMOS compatible low-power microheater optimization and fabrication for smart gas sensor implementations

Bibliographic reference Laconte, Jean ; Dupont, C. ; Flandre, Denis ; Raskin, Jean-Pierre. SOI CMOS compatible low-power microheater optimization and fabrication for smart gas sensor implementations.IEEE SENSORS 2002 conference (Orlando (USA), du 12/06/2002 au 14/06/2002). In: Proceedings of IEEE Sensors 2002. First IEEE International Conferenceon Sensors (Cat. No.02CH37394), IEEE2002, p.1395-400
Permanent URL http://hdl.handle.net/2078.1/68083