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Stress release of PECVD oxide by RTA

Bibliographic reference Charavel, Rémy ; Olbrechts, Benoit ; Raskin, Jean-Pierre. Stress release of PECVD oxide by RTA.Smart Sensors, Actuators, and MEMS (Maspalomas, Gran Canaria, Spain, 19-21 May 2003). In: SPIE - the International Society for Optical Engineering. Proceedings, Spie-int. soc. opt. eng2003, p.Vol. 5116, p. 596-606
Permanent URL http://hdl.handle.net/2078.1/68064