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High resistivity SOI substrates: how high should we go?

Bibliographic reference Lederer, Dimitri ; Desrumeaux, C. ; Brunier, F. ; Raskin, Jean-Pierre. High resistivity SOI substrates: how high should we go?.2003 IEEE International SOI Conference. Proceedings (Newport Beach, CA, USA, 29 September-2 October 2003). In: 2003 IEEE International SOI Conference. Proceedings (Cat. No.03CH37443), IEEE2003, p. 50-51
Permanent URL http://hdl.handle.net/2078.1/68033