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An SU-8 liquid cell for surface acoustic wave biosensors

Bibliographic reference Francis, Laurent ; Friedt, J.-M. ; Bartic, C. ; Campitelli, A.. An SU-8 liquid cell for surface acoustic wave biosensors.MEMS, MOEMS, and Micromachining (Strasbourg (France), du 29/04/2004 au 30/04/2004). In: SPIE - the International Society for Optical Engineering. Proceedings, Spie-int. soc. opt. eng2004, p.Vol. 5455, p. 353-363
Permanent URL http://hdl.handle.net/2078.1/67980