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CMOS compatible 3-D self assembled microstructures using thin film SOI technology

Bibliographic reference Iker, François ; Si Moussa, M. ; André, Nicolas ; Pardoen, Thomas ; Raskin, Jean-Pierre. CMOS compatible 3-D self assembled microstructures using thin film SOI technology.Proceedings of the IEEE Sensors 2004 (Vienna, Austria, 24-27 October 2004). In: Rocha, D.; Sarro, P.M.; Vellekoop, M.J.;, Proceedings of the IEEE Sensors 2004 (IEEE Cat. No.04CH37603), IEEE2004, p.Vol. 3, p. 1113-16
Permanent URL http://hdl.handle.net/2078.1/67968