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Performance of SOI devices transferred onto passivated HR SOI substrates using a layer transfer technique

Bibliographic reference Lederer, Dimitri ; Aspar, B. ; Laghae-Blanchard, C. ; Raskin, Jean-Pierre. Performance of SOI devices transferred onto passivated HR SOI substrates using a layer transfer technique.2006 IEEE International SOI Conference (Niagara Falls, NY, USA, 2-5 October 2006). In: 2006 IEEE International SOI Conference, IEEE2006, p. 29-30
Permanent URL http://hdl.handle.net/2078.1/67913