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SOI devices and ring oscillators on thin dielectric membranes for pressure sensing applications

Bibliographic reference Olbrechts, Benoit ; Rue, Bertrand ; Rinaldi, G. ; Stiharu, I. ; Flandre, Denis ; et. al. SOI devices and ring oscillators on thin dielectric membranes for pressure sensing applications.2007 IEEE International SOI Conference (Indian Wells, CA, USA, 1-4 October 2007). In: Proccedings 2007 IEEE International SOI Conference, IEEE2007, p.109-110
Permanent URL http://hdl.handle.net/2078.1/67840