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Low complexity testing micromachines revealing size-dependent mechanical properties of thin Al films

Bibliographic reference Raskin, Jean-Pierre ; Fabregue, D. ; André, Nicolas ; Coulombier, Michaël ; Pardoen, Thomas. Low complexity testing micromachines revealing size-dependent mechanical properties of thin Al films.TRANSDUCERS '07 & Eurosensors XXI. 2007 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Lyon, France, 10-14 June 2007). In: TRANSDUCERS '07 & Eurosensors XXI. 2007 14th International Conference on Solid-State Sensors, Actuators and Microsystems, IEEE2007, p. 619-622
Permanent URL http://hdl.handle.net/2078.1/67797