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A new on chip nanomechanical testing concept applied to ductile and brittle thin film materials

Bibliographic reference Safi, A. ; Houri, Samer ; Coulombier, Michaël ; Gravier, S. ; André, Nicolas ; et. al. A new on chip nanomechanical testing concept applied to ductile and brittle thin film materials.EuroSimE 2008 International Conference on Thermal, Mechanical and Multi-Physics; Simulation and Experiments in Microelectronics and Micro-Systems (Freiburg im Breisgau, Germany, 20-23 April 2008). In: EuroSimE 2008 International Conference on Thermal, Mechanical and Multi-Physics; Simulation and Experiments in Microelectronics and Micro-Systems, IEEE2008, p. 46
Permanent URL http://hdl.handle.net/2078.1/67734