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Efficient polysilicon passivation layer for crosstalk reduction in high-resistivity SOI substrates

Bibliographic reference Ben Ali, Khaled ; Roda Neve, Cesar ; Gharsallah, A. ; Raskin, Jean-Pierre. Efficient polysilicon passivation layer for crosstalk reduction in high-resistivity SOI substrates.2010 10th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF 2010) (New Orleans, LA, USA, 11-13 January 2010). In: 2010 10th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF 2010), IEEE2010, p. 212-215
Permanent URL http://hdl.handle.net/2078.1/67498