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A new on chip nanomechanical testing concept applied to brittle and ductile thin films materials

Bibliographic reference Pardoen, Thomas ; Safi, A. ; Coulombier, Michaël ; Carbonnelle, Pierre ; Raskin, Jean-Pierre ; et. al. A new on chip nanomechanical testing concept applied to brittle and ductile thin films materials.2nd International Conference on Integration and Commercialization of Micro and Nanosystems 2008 (Clear Water Bay, Kowloon, Hong Kong, China, 3-5 June 2008). In: 2nd International Conference on Integration and Commercialization of Micro and Nanosystems 2008, Asme2008, p. 259-267
Permanent URL http://hdl.handle.net/2078.1/67490