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A MEMS variable Faraday cage as tuning element for integrated silicon micromachined cavity resonators

Bibliographic reference Dancila, Dragos ; Ekkels, P. ; Rottenberg, X. ; Huynen, Isabelle ; De Raedt, W. ; et. al. A MEMS variable Faraday cage as tuning element for integrated silicon micromachined cavity resonators.23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010) (Wanchai, Hong Kong, China, du 24/01/2010 au 28/01/2010). In: 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010), IEEE2010, p. 723-726
Permanent URL http://hdl.handle.net/2078.1/67443