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Interferometric precision with Fourier-based deflectometry

Bibliographic reference Beghuin, D. ; Dubois, X. ; Joannes, L. ; Hutsebaut, X. ; Antoine, Philippe. Interferometric precision with Fourier-based deflectometry.Optical Micro- and Nanometrology III (Brussels, Belgium, 13-16 April 2010). In: Optical Micro- and Nanometrology III, Spie - the international society for optical engineering2010, p.Vol. 7718, 77180B (8 pp.)
Permanent URL http://hdl.handle.net/2078.1/67401