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Quasi-optical technique for sensing bond quality of silicon wafers

Bibliographic reference Elhawil, A. ; Huynen, Isabelle ; Raskin, Jean-Pierre ; Roda Neve, Cesar ; Olbrechts, Benoit ; et. al. Quasi-optical technique for sensing bond quality of silicon wafers.Micro-Optics 2010 (Brussels, Belgium, 12-16 April 2010). In: Micro-Optics 2010, Spie - the international society for optical engineering2010, p.Vol. 7716, 77161R (7 pp.)
Permanent URL http://hdl.handle.net/2078.1/67360