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Effect of dopants on the dissolution behavior of silicon substrates in HF-based cleaning solutions

Bibliographic reference Jeriban, S.A. ; Guiot, Ivette ; Bacherius, Luc ; Proost, Joris ; Sleeckx, E. ; et. al. Effect of dopants on the dissolution behavior of silicon substrates in HF-based cleaning solutions. In: Solid State Phenomena, Vol. 134, p. 139-142 (2008)
Permanent URL http://hdl.handle.net/2078.1/66182