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Tungsten Metallization Technology for High-temperature Silicon-on-insulator Devices

Bibliographic reference Chen, Jian ; Colinge, J.-P.. Tungsten Metallization Technology for High-temperature Silicon-on-insulator Devices.European-Materials-Research-Society 1994 Spring Meeting, Symposium E; High Temperature Electronics - Materials, Devices and Applications (STRASBOURG(France), May 24-27, 1994). In: Materials Science and Engineering B: Solid-State Materials for Advanced Technology, Vol. 29, no. 1-3, p. 18-20 (1995)
Permanent URL http://hdl.handle.net/2078.1/63150