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The Development of Cmos/simox Technology

Bibliographic reference Colinge, JP.. The Development of Cmos/simox Technology.9th Biennial Conference on Insulating Films on Semiconductors (INFOS 95) (VILLARD DE LANS(France), Jun 07-10, 1995). In: Microelectronic Engineering, Vol. 28, no. 1-4, p. 423-430 (1995)
Permanent URL http://hdl.handle.net/2078.1/63112