User menu

Study on titanium salicide process for thin-film SOI devices

Bibliographic reference Chen, J. ; Colinge, JP.. Study on titanium salicide process for thin-film SOI devices.Proceedings of the Symposium J on Advanced Materials for Interconnections of the 1996 E-MRS Spring Meeting Conference (STRASBOURG(France), Jun 04-07, 1996). In: Microelectronic Engineering, Vol. 33, no. 1-4, p. 189-194 (1997)
Permanent URL http://hdl.handle.net/2078.1/62778