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Steady-state measurement of wafer bonding cracking resistance

Bibliographic reference Bertholet, Y. ; Iker, François ; Raskin, Jean-Pierre ; Pardoen, Thomas. Steady-state measurement of wafer bonding cracking resistance. In: Sensors and Actuators A: Physical : an international journal devoted to research and development of physical and chemical transducers, Vol. 110, no. 1-3, p. 157-163 (2004)
Permanent URL http://hdl.handle.net/2078.1/61348