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Thin films stress extraction using micromachined structures and wafer curvature measurements

Bibliographic reference Laconte, J. ; Iker, François ; Jorez, S. ; André, Nicolas ; Proost, Joris ; et. al. Thin films stress extraction using micromachined structures and wafer curvature measurements.In: Microelectronic Engineering, Vol. 76, no. 1-4, p. 219-226 (2004)
Permanent URL http://hdl.handle.net/2078.1/61179