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Production and characterization of a hydraulic microactuator

Bibliographic reference Peirs, J. ; Reynaerts, D. ; Coosemans, J. ; Puers, R. ; Smal, Olivier ; et. al. Production and characterization of a hydraulic microactuator.15th European Workshop on Micromechanics (Leuven(Belgium), Sep 05-07, 2004). In: Journal of Micromechanics and Microengineering : structures, devices & systems, Vol. 15, no. 7, p. S15-S21 (2005)
Permanent URL http://hdl.handle.net/2078.1/60946