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A novel hydraulic microactuator sealed by surface tension

Bibliographic reference De Volder, Michael ; Peirs, J. ; Reynaerts, D. ; Coosemans, J. ; Puers, R. ; et. al. A novel hydraulic microactuator sealed by surface tension.18th European Conference on Solid-State Transducers (St Thomas Univ, Rome(Italy), Sep 13-15, 2004). In: Sensors and Actuators A: Physical : an international journal devoted to research and development of physical and chemical transducers, Vol. 123-24, p. 547-554 (2005)
Permanent URL http://hdl.handle.net/2078.1/60862