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SOI-CMOS compatible low-power gas sensor using sputtered and drop-coated metal-oxide active layers

Bibliographic reference Ivanov, P. ; Laconte, J. ; Raskin, Jean-Pierre ; Stankova, M. ; Sotter, E. ; et. al. SOI-CMOS compatible low-power gas sensor using sputtered and drop-coated metal-oxide active layers. In: Microsystem Technologies : micro and nanosystems - information storage and processing systems, Vol. 12, no. 1-2, p. 160-168 (2005)
Permanent URL http://hdl.handle.net/2078.1/60105
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