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Determination of organic contaminations on Si wafer surfaces by static ToF-SIMS: Improvement of the detection limit with C-60(+) primary ions

Bibliographic reference Poleunis, Claude ; Delcorte, Arnaud ; Bertrand, Patrick. Determination of organic contaminations on Si wafer surfaces by static ToF-SIMS: Improvement of the detection limit with C-60(+) primary ions. In: Applied Surface Science, Vol. 252, no. 19, p. 7258-7261 (2006)
Permanent URL http://hdl.handle.net/2078.1/59952