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Bulk and surface micromachined MEMS in thin film SOI technology

Bibliographic reference Raskin, Jean-Pierre ; Flandre, Denis ; Iker, François ; André, Nicolas ; Olbrechts, Benoit ; et. al. Bulk and surface micromachined MEMS in thin film SOI technology. In: Electrochimica Acta, Vol. 52, no. 8, p. 2850-2861 (2007)
Permanent URL http://hdl.handle.net/2078.1/59699