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Electrical characterization of true Silicon-On-Nothing MOSFETs fabricated by Si layer transfer over a pre-etched cavity

Bibliographic reference Kilchytska, Valeriya ; Flandre, Denis ; Chung, T. M. ; Olbrechts, Benoit ; Vovk, Ya. ; et. al. Electrical characterization of true Silicon-On-Nothing MOSFETs fabricated by Si layer transfer over a pre-etched cavity.3rd Workshop of the Thematic-Network-on-Silicon-on-Insulator-Technology-Devices-and-Cirucits (EUROSOI 07) (Leuven (Belgium), Jan 24-26, 2007). In: Solid-State Electronics, Vol. 51, no. 9, p. 1238-1244 (2007)In: Proceedings of the 3rd Workshop of the Thematic-Network-on-Silicon-on-Insulator-Technology-Devices-and-Cirucits (EUROSOI 07), Pergamon-elsevier Science Ltd : Oxford2007
Permanent URL http://hdl.handle.net/2078.1/59527