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Microfabrication-based nanomechanical laboratory for testing the ductility of submicron aluminium films

Bibliographic reference André, Nicolas ; Coulombier, Michaël ; De Longueville, V. ; Fabregue, D. ; Gets, T. ; et. al. Microfabrication-based nanomechanical laboratory for testing the ductility of submicron aluminium films. In: Microelectronic Engineering, Vol. 84, no. 11, p. 2714-2718 (2007)
Permanent URL http://hdl.handle.net/2078.1/59513