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Materials characterization of WNxCy, WNx and WCx films for advanced barriers

Bibliographic reference Volders, H. ; Tokei, Z. ; Bender, H. ; Brijs, B. ; Caluwaerts, R. ; et. al. Materials characterization of WNxCy, WNx and WCx films for advanced barriers.In: Microelectronic Engineering, Vol. 84, no. 11, p. 2460-2465 (2007)
Permanent URL http://hdl.handle.net/2078.1/59512